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4. End of line filters

All part numbers for the Honeywell MIDAS Sensor Cartridges
Gas Name Chemical Formula Range Sensor Part Number
Ammonia NH3 9-100 ppm MIDAS-E-NH3
Arsine AsH3 18-200 ppbMIDAS-E-ASH
Boron Trichloride BCl3 0.72-8 ppmMIDAS-E-HCL
Boron Trifluoride BF3 0.72-8 ppmMIDAS-E-HFX
Boron Trifluoride (Low Level) BF3 0.18-2 ppmMIDAS-E-HFL
Bromine Br2 0.036-0.4 ppmMIDAS-E-BR2
Carbon Dioxide CO2 0.15-2.0%MIDAS-E-CO2
Carbon Monoxide CO 9-100 ppmMIDAS-E-COX
Chlorine Cl2 0.18-2 ppmMIDAS-E-HAL
Chlorine Dioxide ClO2 0.036-0.4 ppmMIDAS-E-BR2
Diborane B2H6 36-400 ppb MIDAS-E-B2H
Dichlorosilane H2Cl2Si 0.72-8 ppmMIDAS-E-HCL
Difluoromethane** CH2F2 16-240 ppmMIDAS-E-XCF
Disilane Si2H6 1.8-20 ppm MIDAS-E-SHX
Fluorine F2 0.36-4 ppmMIDAS-E-HAL
Germane GeH4 70-800 ppb MIDAS-E-ASH
Hexafluorobutadiene** C4F6 3-40 ppmMIDAS-E-CFX
Hydrogen (%LEL) H2 6.5-100% LELMIDAS-E-LEL*
Hydrogen (ppm) H2 90-1000 ppm MIDAS-E-H2X
Hydrogen Bromide HBr 0.72-8 ppmMIDAS-E-HCL
Hydrogen Chloride HCl 0.72-8 ppmMIDAS-E-HCL
Hydrogen Cyanide HCN 1.8-20 ppmMIDAS-E-HCN
Hydrogen Fluoride HF 1.05-12 ppmMIDAS-E-HFX
Hydrogen Fluoride (Low Level) HFL 0.18-2 ppmMIDAS-E-HFL
Hydrogen Sulfide H2S 3.6-40 ppmMIDAS-E-H2S
Methane (%LEL) CH4 6.5-100% LEL MIDAS-E-LEL*
Methyl Fluoride** CH3F 8-120 ppmMIDAS-E-XHF
Nitric Oxide NO 9-100 ppmMIDAS-E-NOX
Nitrogen Dioxide NO2 1.05-12 ppmMIDAS-E-NO2
Nitrogen Trifluoride** NF3 3.6-40 ppmMIDAS-E-HFX for 00P, XHF for NP1
Octofluorocyclopentene** C5F8 3-40 ppm MIDAS-E-XCF
Oxygen O2 0.2-25% v/v MIDAS-E-O2X
Ozone O3 0.065-0.7 ppmMIDAS-E-O3H
Ozone (Low Level) O3 0.036-0.4 ppm MIDAS-E-O3X
Phosphine PH3 110-1200 ppbMIDAS-E-PH3
Silane SiH4 1.8-20 ppmMIDAS-E-SHX
Silane (Low Level) SiH4 0.18-2 ppmMIDAS-E-SHL
Sulfur Dioxide SO2 0.7-8 ppmMIDAS-E-SO2
Tetra Ethyl Ortho Silicate TEOS 3.6-40 ppm MIDAS-E-TEO
Tungsten Hexafluoride WF6 1.05-12 ppmMIDAS-E-HFX
Tungsten Hexafluoride (Low Level) WF6 0.18-2 ppmMIDAS-E-HFL